SUBSTRATE HOLDER ASSEMBLY, APPARATUS, AND METHODS
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United States of America Patent
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N/A
Issued Date -
Jul 14, 2016
app pub date -
Jan 9, 2015
filing date -
Jan 9, 2015
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
In one or more embodiments, a substrate holder apparatus is provided. A substrate holder apparatus includes a frame having multiple substrate contact supports configured to contact and support a substrate, and one or more vacuum ports configured to apply a vacuum at one or more locations along a bottom edge of a substrate. The one or more vacuum ports provide air outflow that removes liquid and/or residue along a bottom edge of the substrate after immersion into a tank. Assemblies including the substrate holder apparatus and methods of cleaning substrates with the substrate holder apparatus are provided, as are additional aspects.
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