GAS CYLINDER FOR THE STORAGE AND DELIVERY OF P-TYPE DOPANT GASES
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United States of America Patent
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Issued Date -
Jul 14, 2016
app pub date -
Jan 13, 2016
filing date -
Jan 13, 2016
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Abstract
A corrosion resistant gas cylinder includes an electroless nickel-boron layer overlying the inner surface of a steel alloy cylinder. The nickel-boron layer has a thickness of at least about 20 micrometers and a porosity of no greater than about 0.1%. The electroless nickel-boron layer has a boron content of at least about 1% by weight and a surface roughness of no greater than about 5 micrometers. Prior to introducing liquefied gas into the gas cylinder, a cleaning process is carried out using a two-step baking process to clean the surface of the nickel-boron layer. The nickel-boron layer substantially reduces the contamination of liquefied corrosive gases stored in the gas cylinder by metal from the steel wall surface underlying the nickel-boron layer. Metal contamination levels of less than about 55 ppb of iron, 10 ppb of chromium, and 5 ppb of nickel by weight can be maintained in liquefied corrosive gases stored for an extended period of time in the electroless nickel-boron plated gas cylinder.
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