Circulation cooling and heating device for controlling a temperature of a circulating fluid supplied to a chamber
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United States of America Patent
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Issued Date -
Jul 7, 2016
app pub date -
Jul 29, 2014
filing date -
Aug 9, 2013
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Abstract
A circulating cooling/heating device configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment includes: a heat exchanger configured to perform heat exchange between the circulating fluid and a cooling water; a heater configured to heat the circulating fluid; a pump configured to circulate the circulating fluid between the circulating cooling/heating device and the chamber; a cooling water circulation block through which the cooling water passes; and a pressure sensor serving as a pressure detecting unit configured to detect a pressure of the cooled or heated circulating fluid, the pressure sensor being attached to the cooling water circulation block.
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