METHOD OF MANUFACTURING PHOTOSENSITIVE GLASS SUBSTRATE
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United States of America Patent
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Issued Date -
Jul 7, 2016
app pub date -
Aug 13, 2014
filing date -
Aug 13, 2014
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Abandoned
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Abstract
A method of manufacturing a photosensitive glass substrate, including: directly irradiating a plate-like base material composed of a photosensitive glass with an energy beam to form a latent image; crystallizing the latent image by a first heat treatment to obtain a crystallized portion; and dissolving and removing the crystallized portion and applying fine processing thereto, to obtain a photosensitive glass substrate, wherein in the irradiating, an irradiation position of the energy beam is corrected based on a dimensional variation of the photosensitive glass caused by a heat treatment including at least the first heat treatment.
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