AUXILIARY SHEET FOR LASER DICING
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United States of America Patent
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Issued Date -
Jun 30, 2016
app pub date -
Dec 15, 2015
filing date -
Dec 24, 2014
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Abstract
An auxiliary sheet for laser dicing is provided, with which partial adhesion of a substrate film to a processing table is not caused even when dicing a workpiece by using a high output laser light and at a high scan speed, therefore, workability does not decline after that. An adhesive layer is stacked on one surface of the substrate film in the laser dicing auxiliary sheet and a functional layer is stacked on the other surface (a surface to contact with a processing chuck table during dicing), and the functional layer is formed by using a mixture containing metal oxide fine particles, in which an average particle diameter of the primary particle is 5 to 400 nm, and emulsion particles of a thermoplastic resin as a binder material.
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