NOZZLE, CLEANING DEVICE, AND CLEANING METHOD
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United States of America Patent
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Jun 30, 2016
app pub date -
Aug 13, 2013
filing date -
Aug 13, 2013
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Abstract
To suppress the generation, on a surface to be cleaned of a substrate after cleaning, of metal contamination caused by erosion of an inner wall of a path of a nozzle. One aspect of the present invention is a nozzle 11 that causes CO2 particles to be ejected to a substrate, wherein a hard film having a Vickers hardness of Hv 1000 to 5000 is formed on an inner wall of the nozzle.
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