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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES	PARIS

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
BATUDE, Perrine	Dijon, FR	27	1971
DEPRAT, Fabien	Grenoble, FR	4	13
MORAND, Yves	Grenoble, FR	56	759
NIEBOJEWKSI, Heimanu	Grenoble, FR	1	2
POSSEME, Nicolas	Grenoble, FR	98	414

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Dec 23, 2027

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2016/0181,155

METHOD FOR MAKING AN INTEGRATED CIRCUIT IN THREE DIMENSIONS

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