HEATING TYPE VAPORIZING DEVICE
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United States of America Patent
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Issued Date -
Jun 23, 2016
app pub date -
Nov 25, 2015
filing date -
Nov 25, 2015
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Abstract
This invention is a continuous type vaporizing device that makes it possible to output a large flow rate of the material gas stably while the vaporizing device is downsized. The vaporizing device comprises a vaporizing tank that has a vaporizing chamber and that outputs a material gas that is produced by vaporizing the liquid material that is introduced into the vaporizing chamber, a heater that promotes vaporization of the liquid material in the vaporizing chamber by heating the vaporization tank, and a partition wall that partitions a lower space of the vaporizing chamber into a first lower space into which the liquid material is introduced first and a second lower space into which the liquid material that overflows from the first lower space is introduced.
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