Mass transfer tool manipulator assembly
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United States of America Patent
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Jul 17, 2018
Grant Date -
Jun 23, 2016
app pub date -
Feb 26, 2016
filing date -
Feb 25, 2013
priority date (Note) -
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Abstract
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro pick up array and an array of micro devices on a carrier substrate. Displacement of a compliant element of the mass transfer tool manipulator assembly may be sensed to control alignment between the array of electrostatic transfer heads and the array of micro devices.
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