SYSTEMS, APPARATUS, AND METHODS FOR AN IMPROVED POLISHING HEAD GIMBAL USING A SPHERICAL BALL BEARING
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United States of America Patent
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Issued Date -
Jun 23, 2016
app pub date -
Feb 17, 2015
filing date -
Feb 17, 2015
priority date (Note) -
Abandoned
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Abstract
Embodiments of the present invention provide systems, apparatus, and methods for an improved polishing head including an upper portion and a lower portion, the lower portion adapted to hold a substrate and to tilt relative to the upper portion, the tilt enabled by a spherical bearing, wherein the lower portion is adapted to tilt while rotating the substrate against a rotating polishing pad so that the lower portion remains flush against the rotating polishing pad while resisting lateral friction force generated by the rotating polishing pad contacting the substrate and pushing the substrate laterally against the lower portion. Numerous additional aspects are disclosed.
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