Target, adapted to an indirect cooling device, having a cooling plate
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United States of America Patent
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Apr 28, 2020
Grant Date -
Jun 16, 2016
app pub date -
Jun 30, 2014
filing date -
Jul 3, 2013
priority date (Note) -
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Abstract
A device for cooling a target, having a component that includes a cooling duct and having an additional thermally conductive plate that is detachably fastened to the cooling side of the component, the cooling side being the side on which the cooling duct exerts its cooling action, characterized in that between the additional thermally conductive plate and the cooling side of the component, a first self-adhesive carbon film is provided, which is extensively and self-adhesively glued to the one side of the additional thermally conductive plate that faces the cooling side.
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