Fingerprint Sensor Having ESD Protection Structure
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United States of America Patent
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Nov 12, 2015
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Dec 11, 2014
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A fingerprint sensor having ESD protection structure and has a substrate having an upper surface. Multiple sensing electrode plates, an ESD protection electrode part connected to ground, a dielectric layer and a protection layer are formed on the upper surface in bottom-up sequence. The ESD protection layer has a first conductive layer and a second conductive layer. The first conductive layer is formed on the upper surface and coplanar with the sensing electrode plates. The second conductive layer is formed on the dielectric layer and has multiple separated conductive elements. Each of conductive elements overlaps the first conductive layer along a vertical axis and connected to the first conductive layer via multiple vias formed in the dielectric layer. When the first conductive layer and/or the second conductive layer are/is coupled to ground, both of the first and second conductive layers are established a discharging path of static electricity.
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