Micromechanical coriolis rate of rotation sensor
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United States of America Patent
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Jul 17, 2018
Grant Date -
Jun 16, 2016
app pub date -
Feb 19, 2016
filing date -
Dec 23, 2011
priority date (Note) -
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Abstract
A micromechanical sensor that can detect shock effects in order to prevent false measurements. The sensor includes a substrate having a measurement axis and a detection axis that are disposed orthogonally to each other, and first and second driving masses disposed in a plane containing the measurement and detection axes. Each of the driving masses is rotatably coupled to the substrate via a central suspension disposed on the detection axis. The sensor includes drive electrodes that generate rotary motions in each of the driving masses about a drive axis thereof. At least one elastic connecting element allows the driving masses to deflect in opposite directions in response to a rate of rotation about the measurement axis but deflect in the same direction in response to a shock condition.
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