APPARATUS AND METHOD FOR MANUFACTURING GROUP 13 NITRIDE CRYSTAL
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United States of America Patent
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Jun 16, 2016
app pub date -
Aug 5, 2014
filing date -
Aug 8, 2013
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Abstract
An apparatus is used for manufacturing a group 13 nitride crystal by using a flux method. The apparatus includes a reaction vessel, a rotational mechanism, and a structure. The reaction vessel contains a mixed melt and a seed crystal placed in the mixed melt. The mixed melt contains an alkali metal or an alkali-earth metal and a group 13 element. The rotational mechanism rotates the reaction vessel. The structure is provided inside the reaction vessel for stirring the mixed melt and is constructed such that a height of a first portion of the structure close to an inner wall of the reaction vessel is higher than a height of a second portion of the structure close to a center of the reaction vessel.
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