PIEZOELECTRIC DEVICE AND METHOD FOR FABRICATING THE SAME
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United States of America Patent
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Issued Date -
Jun 9, 2016
app pub date -
Mar 26, 2014
filing date -
Mar 26, 2014
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Abandoned
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Abstract
The disclosure provides a piezoelectric device includes a piezoelectric vibrating piece and a coating layer. The piezoelectric vibrating piece includes an electrode and an exposed portion. The coating layer is constituted of a material with a sputtering rate lower than a sputtering rate of a material of the electrode, the coating layer covering the exposed portion.
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