Hollow supports and anchors for mechanical resonators
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United States of America Patent
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Jan 9, 2018
Grant Date -
Jun 9, 2016
app pub date -
Mar 28, 2014
filing date -
Oct 20, 2011
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Abstract
A micromechanical resonator having one or more anchoring stems which are hollow to increase resonator Q factor. By way of example a micromechanical disk resonator embodiment is shown utilizing a resonant micromechanical disk anchored by a stem between at least one electrode used for input and output. To increase resonator Q, a hollow stem is utilized in which an outer thickness of stem material surrounds a hollow area interior of the stem, or that is fabricated with a plurality of vias and/or fabricated substructures containing hollow spaces in the stem material. Measurements have confirmed that Q values can be increased using the hollow core stems by a factor of 2.9 times in certain implementations and operating modes.
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