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Abstract

A charged particle beam device includes: an image displacement vector calculation section that calculates an image displacement vector between a first local frame image and a second local frame image, the first local frame image including an area in a first frame image that is obtained by starting scanning at a timing that corresponds to a first phase of an alternating-current signal, and the area in the first frame image corresponds to a phase that undergoes a given phase shift from the first phase, and the second local frame image including an area in a second frame image that is obtained by starting scanning at a timing that corresponds to a second phase of the alternating-current signal that differs from the first phase, and the area in the second frame image corresponds to a phase that undergoes the given phase shift from the second phase; a scanning deflector that scans a charged particle beam (B) while deflecting the charged particle beam (B); a scanning correction signal generation section that generates a scanning correction signal that corrects the scanning of the charged particle beam (B) based on the image displacement vector; and a scanning signal supply section that supplies a scanning signal that is corrected based on the scanning correction signal to the scanning deflector in synchronization with the alternating-current signal.

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First Claim