METHOD FOR PRODUCING MOLD FOR MINUTE PATTERN TRANSFER, METHOD FOR PRODUCING DIFFRACTION GRATING USING THE SAME, AND METHOD FOR PRODUCING ORGANIC EL ELEMENT INCLUDING THE DIFFRACTION GRATING
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United States of America Patent
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app pub date -
Feb 11, 2016
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Jan 14, 2011
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Abstract
A method for producing a mold includes: applying a block copolymer solution made of first and second polymers on a base member; performing a first annealing process at a temperature higher than Tg of the block copolymer after drying the coating film; forming a concavity and convexity structure on the base member by removing the second polymer by an etching process; performing a second annealing process of the concavity and convexity structure at a temperature higher than Tg of the first polymer; forming a seed layer on the structure; laminating or stacking a metal layer on the seed layer by an electroforming; and peeling off the metal layer from the base member. The second annealing process enables satisfactory transfer of a concavity and convexity structure on the base member onto the metal layer.
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