SILICON NITRIDE POWDER FOR MOLD RELEASE AGENT OF CASTING MOLD FOR CASTING POLYCRYSTALLINE SILICON INGOT AND METHOD FOR MANUFACTURING SAID SILICON NITRIDE POWDER, SLURRY CONTAINING SAID SILICON NITRIDE POWDER, CASTING MOLD FOR CASTING POLYCRYSTALLINE SILICON INGOT AND METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING POLYCRYSTALLINE SILICON INGOT USING SAID CASTING MOLD
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United States of America Patent
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Jun 9, 2016
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Jul 9, 2014
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Jul 9, 2014
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A silicon nitride powder for a release agent of a polycrystalline silicon ingot casting mold, having a specific surface area of 5 to 40 m2/g, wherein, assuming that a content ratio of oxygen present in a particle surface layer is FSO (mass %), a content ratio of oxygen present inside a particle is FIO (mass %), and the specific surface area is FS (m2/g), FS/FSO is 8 to 30 and FS/FIO is 22 or more, and a ratio D10/D90 between a 10 vol % diameter D10 and a 90 vol % diameter D90 in a measurement of a particle size distribution on a volume basis by a laser diffraction particle size distribution meter of 0.05 to 0.20.
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