APPARATUS FOR PRODUCING Si NANOPARTICLES USING MICROWAVE PLASMA AND PRODUCTION METHOD USING THE SAME

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United States of America Patent

APP PUB NO 20160152480A1
SERIAL NO

14712545

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Abstract

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An apparatus for producing Si nanoparticles using microwave plasma and a method of producing Si nanoparticles using the same are disclosed.

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Patent Owner(s)

Patent OwnerAddress
KOREA INSTITUTE OF ENERGY RESEARCHDAEJEON 34129

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHOI, Sun-Ho Daejeon, KR 14 93
JANG, Bo-Yun Daejeon, KR 18 62
KIM, Joon-Soo Daejeon, KR 120 1654
KOO, Jeong-Boon Daejeon, KR 2 15
LEE, Jin-Seok Daejeon, KR 70 549

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