Material modification by neutral beam source with selected collision angle

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United States of America Patent

PATENT NO 9480140
APP PUB NO 20160148713A1
SERIAL NO

14549829

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Abstract

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A neutral beam is scanned across a workpiece surface and the beam angle is controlled in a manner that avoids variation in the beam source-to-workpiece distance during scanning.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Godet, Ludovic Sunnyvale, US 327 3246
Nam, Sang Ki Danville, US 53 535

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