METHOD OF RESOLVING COLOR CONFLICTS FOR CELL-BASED DESIGNS WITH MULTI-PATTERN LITHOGRAPHY

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United States of America Patent

APP PUB NO 20160147933A1
SERIAL NO

14828485

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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According to one general aspect, a method may include receiving a data file that includes placement data regarding a plurality of circuit cells. The circuit cells may include respective layout portions. The layout portions may be associated with a plurality of respective lithographic colors. The method may include determining if a violating circuit cell is to be re-colored. The method may include indicating that, via at least one shape on a color swap layer in the data file, the violating circuit cell is to be at least partially re-colored. A color swap layer shape may cause a mask generator to re-color the portion of the violating circuit cell indicated by the color swap layer shape.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDGYEONGGI DO KOREA SUWON SUWON GYEONGGI-DO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hoover, Andrew P Austin, US 7 109
PETERMANN, David A Elgin, US 2 6
Ramesh, Chandrakanth Austin, US 2 6

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