METHOD FOR MANUFACTURING SEMICONDUCTOR APPARATUS AND SEMICONDUCTOR APPARATUS
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United States of America Patent
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app pub date -
Oct 26, 2015
filing date -
Nov 19, 2014
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Abstract
A method for manufacturing a semiconductor-apparatus, including an encapsulating step of a device mounting surface of a substrate having semiconductor-devices mounted thereon with a base-attached encapsulant having a base and a thermosetting resin layer formed on one surface of the base, the semiconductor-devices being mounted by flip-chip bonding, the encapsulating step including a unifying stage of the substrate having the semiconductor-devices mounted thereon and the base-attached encapsulant under a reduced pressure condition with a vacuum of 10 kPa or less and a pressing stage of the unified substrate with a pressure of 0.2 MPa or more. A method for manufacturing a semiconductor-apparatus that can inhibit warping even when a thin substrate with a large area is encapsulated, sufficiently perform underfilling of semiconductor-devices mounted by flip-chip bonding, and provide a semiconductor-apparatus excellent in encapsulating performance such as heat and moisture resistance reliabilities without void and non-filling portion of the encapsulating layer.
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