APPARATUS AND METHOD FOR HOLDING A WORKPIECE
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United States of America Patent
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Issued Date -
May 19, 2016
app pub date -
Nov 14, 2014
filing date -
Nov 14, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention relates to an apparatus for holding a workpiece to allow dicing of the workpiece. The apparatus comprises a base, an inner support member and an outer support member that is more deformable than the inner support member and arranged along a periphery of the inner support member. In use, air is extracted from suction holes of the inner support member, urging the workpiece against the inner and outer support members. Upon such urging, the outer support member deforms to seal a gap between the workpiece and the inner support member. This helps to increase the magnitude of the forces holding the workpiece against the inner support member.
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