SYSTEMS AND METHOD FOR LASER VOLTAGE IMAGING STATE MAPPING
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United States of America Patent
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Issued Date -
May 19, 2016
app pub date -
Jan 21, 2016
filing date -
May 1, 2009
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Abandoned
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Abstract
An apparatus and method for laser probing of a DUT is disclosed. The system enables laser voltage imaging state mapping of devices within the DUT. A selected area of the DUT is illuminating a while the DUT is receiving test signals causing certain of the active devices to modulate. Light reflected from the DUT is collected and is converted into an electrical signal. Phase information is extracting from the electrical signal and a two-dimensional image is generated from the phase information, wherein the two-dimensional image spatially correlates to the selected area.
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