METHODS OF FORMING LAYERS
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United States of America Patent
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Issued Date -
May 19, 2016
app pub date -
Nov 30, 2015
filing date -
Apr 7, 2011
priority date (Note) -
Abandoned
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Abstract
A method of forming a layer, the method including providing a substrate having at least one surface adapted for deposition thereon; and directing a particle beam towards the surface of the substrate, the particle beam including small molecule molecular species, wherein the small molecule molecular species break apart upon interaction with atoms at the substrate into atomic components, each of the atomic components having implant energies from about 20 eV to about 100 eV to form a layer.
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