Using A Carrier Head With Shims
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United States of America Patent
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Issued Date -
May 19, 2016
app pub date -
Jan 26, 2016
filing date -
Jan 26, 2016
priority date (Note) -
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Abstract
A carrier head includes a base, a substrate mounting surface, a retaining ring secured to the base, and a plurality of stacked shims located between the base and the retaining ring. The retaining ring has a bottom surface for contacting a polishing pad during polishing.
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