NON-CONTACT SURFACE-SHAPE MEASURMENT METHOD AND APPARATUS USING WHITE LIGHT INTERFEROMETER OPTICAL HEAD
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United States of America Patent
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May 12, 2016
app pub date -
Oct 30, 2015
filing date -
Nov 10, 2014
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Abstract
A non-contact surface-shape measuring method uses a white light interferometer optical head that divides, through a beam splitter, light emitted from a white light source into reference light for a reference mirror and measurement light for a measured object surface; obtains an image having interference fringes generated from an optical path difference of light reflecting from the reference mirror and light reflecting from the measured object surface; and is displaced for scanning in a vertical direction with respect to the measured object surface in order to obtain the image having interference fringes. While the white light interferometer optical head is displaced in a scanning direction, a position of the optical head in the scanning direction is detected, and the image having interference fringes is obtained at predetermined spatial intervals in the scanning direction.
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