Microelectromechanical systems fabricated with roll to roll processing
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United States of America Patent
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Jun 25, 2019
Grant Date -
May 12, 2016
app pub date -
Oct 29, 2015
filing date -
Oct 31, 2014
priority date (Note) -
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Abstract
Roll to roll processing techniques are described to produce microelectromechanical systems having releasable and moveable mechanical structures. A micro-pump that includes a pump body having compartmentalized pump chambers, with plural inlet and outlet ports and valves and plural membranes enclosing the pump chambers is described as a representative example.
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