SYSTEMS AND METHODS FOR REMOVING CONTAMINATION FROM SEED LAYER SURFACE
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United States of America Patent
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May 5, 2016
app pub date -
Oct 29, 2014
filing date -
Oct 29, 2014
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Abstract
An electrochemical deposition plating tool in accordance with one embodiment of the present disclosure includes one or more electrochemical deposition chambers and a hydrogen radical H* generation chamber.
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