METHOD AND DEVICE FOR TREATING A SUBSTRATE SURFACE
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United States of America Patent
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May 5, 2016
app pub date -
Jul 4, 2013
filing date -
Jul 4, 2013
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Abstract
A method for treatment of a substrate surface of a substrate by applying a liquid to the substrate surface, the liquid which has been applied to the substrate surface being heated by a heating area which is located above the substrate surface, wherein the temperature of the liquid is kept constant by moving the heating area up and down. Furthermore the invention relates to a corresponding device.
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