Importance

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Abstract

Ferroelectric ceramics including: a Pb(Zr_1-BTi_B)O₃ seed crystal film formed on a foundation film; and a Pb(Zr_1-xTi_x)O₃ crystal film, wherein: the seed crystal film is formed by sputtering while the foundation film is being disposed on an upper side of a sputtering target and the foundation film is being made to face the sputtering target; in the seed crystal film, a Zr/Ti ratio on the crystal film side from the center in the thickness direction thereof is larger than a Zr/Ti ratio on the foundation film side from the center in the thickness direction thereof; the crystal film is crystallized by coating and heating a solution containing, in an organic solvent, a metal compound wholly or partially containing ingredient metals of the crystal film and a partial polycondensation product thereof; and the B and the x satisfy formulae 2 and 3, respectively, below,

description='In-line Formulae' end='lead'0.1<B<1  formula 2description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'0.1<x<1  formula 3.description='In-line Formulae' end='tail'

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First Claim