LIQUID DISPENSER WITH IMPROVED DRIP PREVENTION
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United States of America Patent
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Issued Date -
Apr 28, 2016
app pub date -
Oct 28, 2014
filing date -
Oct 28, 2014
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Abstract
In an apparatus for treating a wafer-shaped article, a spin chuck is provided for holding and rotating a wafer-shaped article. A liquid dispenser comprises a supply conduit that divides to form a first branch extending toward a dispensing outlet of the liquid dispenser and a second branch communicating with a vent opening of the liquid dispenser. The second branch extends upwardly relative to the first branch over at least a portion of its length.
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