PIEZOELECTRIC FORCE MEASURING DEVICE HAVING INTEGRATED WEAR-PROTECTION AND ANTI-FRICTIONAL PROPERTIES
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United States of America Patent
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Issued Date -
Apr 21, 2016
app pub date -
Oct 22, 2013
filing date -
Nov 13, 2012
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Abandoned
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Abstract
A force measuring device including a crystalline layer with piezoelectric properties. The layer is arranged on at least part of a surface of a solid state actuator (or carrier). The device also includes at least one wear-protection layer with anti-frictional properties. The piezoelectric layer includes crystalline aluminium nitride having a hexagonal crystal structure with a pronounced crystal orientation (002), at least one electrically conductive layer being applied between the surface of the solid-state actuator and the crystalline aluminium nitride layer. The conductive layer is preferably a metal layer consisting of at least one metal, which when oxidized, forms an electrically insulating oxide that is mechanically and thermally more stable than molybdenum(VI) oxide (Mo03).
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