LIQUID DISPENSING SYSTEMS WITH GAS REMOVAL AND SENSING CAPABILITIES

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United States of America Patent

APP PUB NO 20160107877A1
SERIAL NO

14928591

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Abstract

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A fluid dispensing system for delivering a gas free chemical. The fluid dispensing system includes a gas separation device that separates a liquid from bubbles entrained in the liquid and accumulating the gas from the bubbles in a reservoir. A level sensor detects if the liquid in the reservoir drops too low, triggering the gas separation device to vent the gas from the reservoir. An empty detect apparatus that detects pressure droop of the liquid may also be implemented for taking appropriate action.

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Patent Owner(s)

Patent OwnerAddress
ADVANCED TECHNOLOGY MATERIALS INC7 COMMERCE DRIVE DANBURY CT 06810

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHISM, Richard D Round Rock, US 12 35
KOLAND, Amy Eden Prairie, US 33 292
KUSZ, Matthew Bloomington, US 28 338
MENNING, Joseph Patrick Prior Lake, US 4 19
TOM, Glenn M Bloomington, US 106 3211
WARE, Donald D Woodbury, US 26 280

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