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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
HITACHI CHEMICAL COMPANY LTD	9-2 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 100-6606

International Classification(s)

• B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....
• C09G:POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH; S....

• 2014 Application Filing Year
• B24B Class
• 633 Applications Filed
• 543 Patents Issued To-Date
• 85.79 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
HANANO, Masayuki	Chiyoda-ku, Tokyo, JP	14	97
# of filed Patents : 14 Total Citations : 97
MISHIMA, Kouji	Chiyoda-ku, Tokyo, JP	8	59
# of filed Patents : 8 Total Citations : 59
SAKASHITA, Masahiro	Chiyoda-ku, Tokyo, JP	13	248
# of filed Patents : 13 Total Citations : 248

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Patent Citation Ranking

• 6 Citation Count
• B24B Class

• 20.18 % this patent is cited more than
• 9 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Oct 21, 2027

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2016/0107,286

CMP POLISHING SOLUTION AND POLISHING METHOD USING SAME

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Abstract

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A CMP polishing liquid for polishing a ruthenium-based metal, comprising polishing particles, an acid component, an oxidizing agent, a triazole-based compound, a quaternary phosphonium salt and water, wherein the acid component contains at least one selected from the group consisting of inorganic acids, monocarboxylic acids, carboxylic acids having a plurality of carboxyl groups and having no hydroxyl group, and salts thereof, the polishing particles have a negative zeta potential in the CMP polishing liquid, and the pH of the CMP polishing liquid is 3.0 or more and less than 7.0.

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Description

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Claims

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