YTTRIA BASED CONDUCTIVE PLASMA-RESISTANT MEMBER AND METHODS THEREOF
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Apr 14, 2016
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Oct 9, 2015
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Oct 10, 2014
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Abstract
The present invention discloses a conductive plasma-resistant member including an yttrium oxide. The plasma-resistant member of the present invention includes an yttrium compound which includes a matrix phase consisting of yttrium oxides, and a conductive dispersed phase. According to the present invention, the present invention provides a semiconductor-grade yttria composite which may be used as a plasma-resistant member requiring conductivity like a focus ring.
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