METHOD OF PREPARING TRICHLOROSILANE
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United States of America Patent
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Issued Date -
Apr 14, 2016
app pub date -
Jun 18, 2014
filing date -
Jun 19, 2013
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Abstract
This invention relates to a method of preparing trichlorosilane, which enables trichlorosilane to be obtained at improved yield using silicon having copper silicide uniformly formed thereon, by uniformly distributing and applying a copper compound on the surface of silicon and then performing heat treatment.
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