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Abstract

A method for generating continuous wave laser radiation in the deep ultraviolet (DUV) spectral range includes the steps of: generating first laser radiation in the ultraviolet spectral range between 205 nm and 265 nm at a first power level, wherein the generation of the first laser radiation involves not more than two frequency conversion steps; generating second laser radiation in the infrared spectral range at a wavelength of more than 900 nm at a second power level; and sum frequency mixing the first and second laser radiation for generating the laser radiation in the deep ultraviolet spectral range below 205 nm. Moreover, a laser system generates continuous wave laser radiation in the DUV spectral range. According to a preferred embodiment, the DUV laser radiation is tunable in wavelength.

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First Claim