ARC EVAPORATION COATING SOURCE HAVING A PERMANENT MAGNET
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United States of America Patent
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Apr 17, 2014
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Apr 22, 2013
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Abstract
An arc evaporation coating source includes a target made of a coating material to be vapor-deposited, a ferromagnetic yoke for influencing the vapor deposition of the coating material to be vapor-deposited and at least one permanent-magnetic body for influencing the vapor deposition of the coating material to be vapor-deposited. The ferromagnetic yoke is disposed in contact with the target. The permanent-magnetic body is fastened to the target by the ferromagnetic yoke.
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