PLASMA DIAGNOSTIC METHOD AND APPARATUS USING RAMAN SCATTERING
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United States of America Patent
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Apr 7, 2016
app pub date -
Apr 10, 2015
filing date -
Oct 7, 2014
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Abstract
A plasma diagnostic method and apparatus using Raman scattering are disclosed herein. The plasma diagnostic method using Raman scattering includes focusing a laser beam, controlled such that the laser beam enters a preset polarized state, into a gas within a vacuum chamber, generating plasma in response to the focusing of the laser beam, magnetizing the generated plasma by inducing an electromagnetic field using a radio frequency (RF) power source mounted on the vacuum chamber and configured to provide an RF signal, and performing plasma diagnostic parameter-based monitoring based on scattered light generated via the laser beam incident into the magnetized plasma.
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