CRYOPUMP
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United States of America Patent
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Issued Date -
Apr 7, 2016
app pub date -
Oct 6, 2015
filing date -
Oct 7, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A cryopump includes: a cryopump vessel that defines an inlet; a refrigerator including a first stage and a second stage housed in the cryopump vessel, the second stage being cooled to a lower temperature than that of the first stage; a first cryopanel thermally connected to the first stage and surrounded by the cryopump vessel; and a second cryopanel thermally connected to the second stage and surrounded by the first cryopanel. The first cryopanel includes a plate member having an inlet aperture at the inlet. The inlet aperture is formed in the plate member such that a ratio of a conductance of the plate member with respect to an aperture conductance of the inlet is 6% or less.
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