IMAGING DEVICE AND METHOD FOR HIGH-SENSITIVITY OPTICAL SCANNING AND INTEGRATED CIRCUIT THEREFOR
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United States of America Patent
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Issued Date -
Mar 31, 2016
app pub date -
Dec 10, 2015
filing date -
Dec 10, 2015
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Abstract
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
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