Optical assembly

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United States of America Patent

PATENT NO 9939730
SERIAL NO

14962149

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Abstract

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An optical assembly, in particular for a lithography system for imaging lithographic micro- or nanostructures, includes at least two optical elements arranged successively in a beam path of the optical assembly, an acquisition device designed to acquire radiation signals from marking elements on or at the at least two optical elements, and a control device coupled to the acquisition device and which is designed to determine the plurality of properties of the optically active surface of the at least two optical elements as a function of the information contained in the radiation signals originating from the marking elements. The disclosure also relates to a method for operating the optical assembly.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHGERMANY COHEN OBERKOCHEN BADEN-WURTTEMBERG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahles, Florian Aalen, DE 3 9
Bittner, Boris Roth, DE 45 321
Fritzsche, Steffen Aalen, DE 16 107
Pauls, Walter Huettlingen, DE 12 31
Schneider, Sonja Oberkochen, DE 26 89
Schoemer, Ricarda Zusmarshausen, DE 19 51
Wabra, Norbert Werneck, DE 58 344
Wagner, Hendrik Aalen, DE 38 729
Wald, Christian Aalen, DE 18 128

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