METHOD OF MANUFACTURING DIAPHRAGM
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United States of America Patent
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Issued Date -
Mar 24, 2016
app pub date -
Sep 19, 2014
filing date -
Sep 19, 2014
priority date (Note) -
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Abstract
The present disclosure illustrates a diaphragm and manufacturing method thereof. The diaphragm includes a ring-like diaphragm edge made of metal material and a diaphragm film formed by graphene film plate. The diaphragm film is fixedly connected with an edge of the diaphragm. The present disclosure uses the metal ring and the graphene film to form the diaphragm, to increase sensitivity and strength of the diaphragm. At the same time, the diaphragm of the present disclosure can meet the requirement for minimized manufacturing by utilizing manufacturing processes of CVD, PVD, exposure, and development.
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