Zone Plate and Method for Fabricating Same Using Conformal Coating
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Sep 22, 2015
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Sep 24, 2014
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Abstract
A system and method for improving efficiency of zone plates fabricated by conformal layer coatings is disclosed. In embodiments, the inventive conformal layer coating zone plates provide increased zone widths from one times a deposited conformal layer coating thickness up to and including two times the conformal layer coating thickness. By designing a template that increases a mark-to-space ratio of the annular rings of the template, coating sidewalls of the annular rings with an conformal layer coating to form the zones, and then substantially filling annular channels defined by the annular rings with the conformal layer coating to form wider zones, significant efficiency increases can be achieved over conventional conformal layer coating zone plates, especially for innermost zones.
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