Pressure Sensor
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United States of America Patent
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Issued Date -
Mar 24, 2016
app pub date -
Feb 17, 2014
filing date -
Feb 27, 2013
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Abstract
A pressure sensor with a ceramic base body, a measuring membrane connected to the base body forming a measuring chamber, and an electromechanical converter that serves to convert a pressure-related deformation of the measuring membrane into a primary electrical signal. The pressure sensor is characterized by a low thermal measuring error, especially during temperature changes, due to the base body consisting of a ceramic material with high thermal conductivity, especially a thermal conductivity greater than or equal to 50 W/mK.
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