CERAMIC MEMBER AND DEFECT TEST SYSTEM
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United States of America Patent
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Issued Date -
Mar 24, 2016
app pub date -
Sep 19, 2014
filing date -
Sep 19, 2014
priority date (Note) -
Abandoned
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Abstract
A ceramic member includes a housing body made of ceramics provided with a first surface set as a measurement base surface extending in an X1 direction and a Y1 direction that is perpendicular to the X1 direction, and an attachment surface to which a member to be attached is fixed, the attachment surface being provided to have a first inclined angle with respect to the measurement base surface in the X1 direction and a second inclined angle with respect to the measurement base surface in the Y1 direction.
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