Polishing pad, polishing apparatus and method for manufacturing polishing pad
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 17, 2018
Grant Date -
Mar 24, 2016
app pub date -
Sep 8, 2015
filing date -
Sep 19, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Calculated Rating
|
US Family Size
|
Non-US Coverage
|
Abstract
The present invention relates to a polishing pad comprising a base sheet containing a restriction layer. The invention also relates to a polishing apparatus and a method for manufacturing a polishing pad.
First Claim
Other Claims data not available
Family
+
−
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| TW | B | TWI630982 | Sep 19, 2014 |
| CN | B | CN105437056 | Dec 04, 2014 |
International Classification(s)
- 2015 Application Filing Year
- B24B Class
- 630 Applications Filed
- 508 Patents Issued To-Date
- 80.64 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- B24B Class
- 37.85 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jan 17, 2026 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jan 17, 2030 |
