INTEGRATED MEMS AND IC SYSTEMS AND RELATED METHODS
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United States of America Patent
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Issued Date -
Mar 17, 2016
app pub date -
Jul 20, 2015
filing date -
Oct 31, 2008
priority date (Note) -
Abandoned
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Abstract
An integrated MEMS and IC system (MEMSIC), as well as related methods, are described herein. According to some embodiments, a mechanical resonating structure is coupled to an electrical circuit (e.g., field-effect transistor). For example, the mechanical resonating structure may be coupled to a gate of a transistor. In some cases, the mechanical resonating structure and electrical circuit may be fabricated on the same substrate (e.g., Silicon (Si) and/or Silicon-on-Insulator (SOI)) and may be proximate to one another.
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